发明名称 |
ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS |
摘要 |
An ultrasonic cleaning method for cleaning an object in a liquid in which a first gas is dissolved includes preparing the liquid in which the first gas is dissolved and introducing a second gas into the liquid while irradiating the liquid with ultrasonic waves so as to realize a state where bubbles containing the first gas dissolved in the liquid continue to be generated. The object is cleaned in the state where the bubbles containing the first gas continue to be generated.
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申请公布号 |
US2013312788(A1) |
申请公布日期 |
2013.11.28 |
申请号 |
US201313892327 |
申请日期 |
2013.05.13 |
申请人 |
SILTRONIC AG |
发明人 |
KUBO ETSUKO;HAIBARA TERUO;MORI YOSHIHIRO;UCHIBE MASASHI |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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