发明名称 |
SOLID-STATE LASER AND INSPECTION SYSTEM USING 193NM LASER |
摘要 |
Improved laser systems and associated techniques generate an ultra-violet (UV) wavelength of approximately 193.368 nm from a fundamental vacuum wavelength near 1064 nm. Preferred embodiments separate out an unconsumed portion of an input wavelength to at least one stage and redirect that unconsumed portion for use in another stage. The improved laser systems and associated techniques result in less expensive, longer life lasers than those currently being used in the industry. These laser systems can be constructed with readily-available, relatively inexpensive components. |
申请公布号 |
WO2013177000(A1) |
申请公布日期 |
2013.11.28 |
申请号 |
WO2013US41688 |
申请日期 |
2013.05.17 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
CHUANG, YUNG-HO ALEX;ARMSTRONG, J. JOSEPH;DRIBINSKI, VLADIMIR;FIELDEN, JOHN |
分类号 |
H01S3/00 |
主分类号 |
H01S3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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