| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem in which: a movable comb-teeth electrode needs to be designed to have a small spring constant and a high Q-value of a circuit in order to vibrate the movable comb-teeth electrode sufficiently large, and needs to be sealed in high vacuum to suppress air resistance.SOLUTION: An electrostatic type converter includes an input-side electrostatic actuator 20a that can vibrate by application of an AC voltage or self oscillation, and an output-side electrostatic actuator 30a that is connected with the input-side electrostatic actuator 20a via an amplitude amplification and attenuation mechanism 6a that vibrates at an amplitude equal to or larger (smaller) than the vibration of the input-side electrostatic actuator 20a. The output-side electrostatic actuator 30a includes a movable electrode and a stationary electrode, either one of which has an electret formed thereon. |
