Substrate Detection Apparatus

摘要

A substrate detection apparatus has a simple structure and is easy to install. An inspection location is defined at an end of a moving range of a container as it is transported by a transport device. A range finder is provided which emits detection wave and receives the detection wave that is reflected from an object to detect the distance to the object, is located outwardly of the end of the moving range in the transporting direction, and is positioned such that the detection wave is emitted toward an opening of the container located at the inspection location and can advance through a substrate storing area in a direction that intersects with a direction parallel to the surface of the substrate. A presence determination portion is provided which determines that a substrate exists in the container if and when the detected value from the range finder falls within a predetermined range.