| 摘要 |
FIELD: electricity.SUBSTANCE: invention relates to a power supply device for at least one silicon rod (3) during deposition of silicon in accordance with the Siemens process, besides, the device comprises at least one input (E) for connecting the device to an electrical network (N) of power supply to feed electrical energy, at least one output (A), which connects to at least one silicon rod (3) and at least one AC transmitter-controller (1) for power supply of at least one silicon rod connected to at least one output (A) with electric current from the network (N) of power supply. The device further comprises at least one frequency inverter (2) for feeding at least one silicon rod (3) connected to at least one output (A) with electric current from the network (N) of power supply which has higher frequency than the current generated by the AC transmitter-controller (1).EFFECT: optimal temperature distribution inside a silicon rod by increasing uniformity of current density distribution over its cross section.21 cl, 6 dwg |
