SEAL RINGS IN ELECTROCHEMICAL PROCESSORS

摘要

A seal ring of an electrochemical processor is not slid to a side or not transformed when being pressed against the surface of a wafer. The seal ring is installed on a rotor of the processor and includes an outer wall connected to a tip arc via an end portion. The outer wall can be a linear wall. A supporting ring can be attached on the seal ring for more precise sealing. Knife edge seal rings which are slid or transformed to a side on the surface of the wafer can be utilized. The performance of the sealing rings can be improved by the regular and consistent sliding of the sealing rings.