| 摘要 |
PROBLEM TO BE SOLVED: To provide a relative position measurement device which enables a detection in a high resolution even if a coarse line sensor of pixel pitch is used and prevents an error from occurring even if eccentricity and meander of a scale are generated. SOLUTION: The device comprises a scale 2 formed by a continuous mark pattern 2a by a change of predetermined reflectivity or transmissivity, a light source to illuminate the scale 2, a line sensor 4 reading the pattern of the scale 2, a signal processing part to process the output signal of the line sensor 4. In the relative position detection device for detecting the relative position and speed of the scale 2, the mark pattern 2a of the scale 2 is formed by a constantly spaced line pattern perpendicular to the direction of movement of the scale, and the line sensor 4 is arranged with a predetermined angle with respect to the line pattern 2a. COPYRIGHT: (C)2008,JPO&INPIT |
