发明名称 |
X-ray detector for electron microscope |
摘要 |
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
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申请公布号 |
US8592764(B2) |
申请公布日期 |
2013.11.26 |
申请号 |
US201313855373 |
申请日期 |
2013.04.02 |
申请人 |
FEI COMPANY |
发明人 |
VON HARRACH HANNO SEBASTIAN;FREITAG BERT HENNING;DONA PLEUN |
分类号 |
H01J37/244;G01N23/225;H01J37/26;H01J37/28;H01J49/06 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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