ONE BODY TYPE EVAPORATION LINEAR SOURCE AND THIN LAYERS DEPOSITION APPARATUS FOR FLAT PANEL DISPLAY HAVING THE SAME

摘要

An integrated evaporation linear source and a substrate evaporation device for slab display elements including the same are disclosed. The integrated evaporation linear source according to the present invention comprises: a source body forming a place in which evaporation materials evaporated on the surface of a substrate are moved; a cooling block arranged to surround the source body and cooling the source body; and a thermal expansion compensating unit formed in a free end area of the source body and compensating the thermal expansion of the source body relative to the substrate.