发明名称 |
ULTRASONIC TRANSDUCER, ULTRASONIC PROBE, AND ULTRASONIC EXAMINATION DEVICE |
摘要 |
An ultrasonic transducer includes a substrate, a supporting film, and a piezoelectric element. The substrate includes an opening. The supporting film is configured on the substrate to cover the opening. The piezoelectric element is configured at a part of the supporting film. The part overlaps with the opening in a planar view in a thickness direction of the substrate. A thickness of the part of at a center of gravity in the planar view is smaller than a thickness of an outer edge portion of the part. The outer edge portion is closer to the substrate than the center to the substrate.
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申请公布号 |
US2013308425(A1) |
申请公布日期 |
2013.11.21 |
申请号 |
US201313896700 |
申请日期 |
2013.05.17 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
NAKAMURA TOMOAKI;SUZUKI HIRONORI;TSURUNO JIRO |
分类号 |
H01L41/08;G01S15/02 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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