| 摘要 |
PROBLEM TO BE SOLVED: To excellently chuck a workpiece having unevenness on its outer surface.SOLUTION: A chuck device 10 has a plurality of claw parts 16 which are abutted on an outer surface 104 of a workpiece 100 to pressing and chuck the workpiece 100. At least one of the plurality of claw parts 16 includes a base 20 which is closely movable/separately movable to/from the workpiece 100, and first and second tilting bodies 32, 34 which have a contact surface 80 to be brought into surface-contact with an outer surface of the workpiece 100, and is tiltably supported by the base 20 so that the contact surface 80 is opposite to the outer surface 104 of the workpiece 100. |
