| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an inkjet recording head by which a water repellent film on the lateral surface of a nozzle pore 1a can be easily removed, thereby, inability to eject ink can be avoided and the deterioration of the water repellent film 3 upon anodic bonding can be suppressed, and the ejection stability of an ink droplet can be secured.SOLUTION: A method for manufacturing an inkjet recording head includes a film forming process, a removal process and a bonding process. In the film forming process, a water repellent film 3 is formed on a nozzle plate 1 where a nozzle pore 1a is formed by a vacuum vapor deposition method. In the removal process, the water repellent film running around on the lateral surface of the nozzle pore 1a is removed. In the bonding process, intermediate glass 21 where a through-hole 21a to be an ink flow channel is formed is made to adhere to a surface opposite to the film forming side of the water repellent film 3 on the nozzle plate 1 after the removal process, and the nozzle plate 1, the intermediate glass 21 and a body plate 30 are integrated by anodic bonding while a pressing member 13 is placed on the nozzle plate 1 so that the water repellent film 12 preliminarily formed on the surface of the pressing member 13 is opposed to the water repellent film 3. |
