| 摘要 |
<p>In a system having a substrate holding means for holding a substrate, wherein the substrate holding means is rotatable about an axis of rotation that is perpendicular to an X-Y coordinate system, a method for determining position of the axis of rotation in the X-Y coordinate system, comprising the steps of: providing a reference labeling on the substrate holding means or on the substrate; determining a first X-Y reference position RP of a reference labeling on the substrate holding means or on the substrate by means of optical positional detecting means that is fixed relative to the X-Y coordinate system, rotating the substrate holding means by a defined angle of rotation R around the axis of rotation, determining by means of said fixed optical positional detecting means a second X-Y reference position RP' of the reference labeling that is changed by the rotation, and calculating the X-Y position of the axis of rotation in the substrate.</p> |
