发明名称 PROCESSING DEVICE AND PROCESSING METHOD OF PLATE MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a processing device of a plate member which simplifies a structure of the device, and to provide a processing method of the plate member.SOLUTION: A processing device 1 of a plate member WF includes: transfer means 2 including a contact member 22 contacting with one surface of the plate member WF, the transfer means 2 which holds the plate member WF using the contact member 22 and transfers the contact member 22; support means 3 including a reception part 33 receiving the contact member 22 and supporting the plate member WF from the one surface side while receiving the contact member 22; and processing means 4 performing predetermined processing to the other surface of the plate member WF supported by the support means 3.
申请公布号 JP2013235979(A) 申请公布日期 2013.11.21
申请号 JP20120107786 申请日期 2012.05.09
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址