| 摘要 |
A optical module includes, a wavelength variable interference filter which include reflection films opposite to each other and an electrostatic actuator portion including a first electrostatic actuator and a second electrostatic actuator and changing a gap between the reflection films, and a voltage control portion which controls voltage which is applied to the electrostatic actuator portion, the voltage control portion includes, a bias driving portion which applies bias voltage to the first electrostatic actuator, a gap detector, and a feedback control portion which applies feedback voltage corresponding to a detected gap amount to the second electrostatic actuator. |
