发明名称 ELECTROSTATIC CHUCK
摘要 A ceramic material according to the present invention mainly contains magnesium, aluminum, oxygen, and nitrogen, the ceramic material has the crystal phase of a MgO-AlN solid solution in which aluminum nitride is dissolved in magnesium oxide, the crystal phase serving as a main phase. Preferably, XRD peaks corresponding to the (200) and (220) planes of the MgO-AlN solid solution measured with CuKalpha radiation appear at 2theta=42.9 to 44.8° and 62.3 to 65.2°, respectively, the XRD peaks being located between peaks of cubic magnesium oxide and peaks of cubic aluminum nitride. More preferably, the XRD peak corresponding to the (111) plane appears at 2theta=36.9 to 39°, the XRD peak being located between a peak of cubic magnesium oxide and a peak of cubic aluminum nitride.
申请公布号 KR20130126622(A) 申请公布日期 2013.11.20
申请号 KR20137012717 申请日期 2011.10.11
申请人 NGK INSULATORS, LTD. 发明人 AIKAWA KENICHIRO;WATANABE MORIMICHI;JINDO ASUMI;KATSUDA YUJI;SATO YOSUKE;ISODA YOSHINORI
分类号 C04B35/581;C04B35/04;H01L21/3065;H01L21/31 主分类号 C04B35/581
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