发明名称 |
ULTRA FINE LINE PANNEL AND METHOD FOR FABRICATIONG THE SAME |
摘要 |
A method for fabricating an ultra fine line substrate according to the present invention includes a step for forming a first sacrificial layer on the first region of a substrate including the first region and a second region, a step for forming a second sacrificial layer on the second region of the substrate, a step for removing the first sacrificial layer, a step for forming a bonding enforcement layer in the first region, and a step for forming a conductive layer on the bonding enforcement layer. [Reference numerals] (S100) Forming a concave unit;(S102) Forming a first sacrificial layer;(S104) Forming a second sacrificial layer;(S106) Forming a third sacrificial layer;(S108) Removing the first sacrificial layer;(S110) Forming a bonding enforcement layer;(S112) Ultraviolet rays - ozone treatment;(S114) Forming a conductive layer;(S116) Removing the second and third sacrificial layers |
申请公布号 |
KR101331589(B1) |
申请公布日期 |
2013.11.20 |
申请号 |
KR20120052189 |
申请日期 |
2012.05.16 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
HWANG, JUN YOUNG;KANG, HEUI SEOK;KANG, KYUNG TAE;LEE, SANG HO;YUN, GYU YOUNG;SHIN, KWON YONG |
分类号 |
H01L21/28 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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