发明名称 ULTRA FINE LINE PANNEL AND METHOD FOR FABRICATIONG THE SAME
摘要 A method for fabricating an ultra fine line substrate according to the present invention includes a step for forming a first sacrificial layer on the first region of a substrate including the first region and a second region, a step for forming a second sacrificial layer on the second region of the substrate, a step for removing the first sacrificial layer, a step for forming a bonding enforcement layer in the first region, and a step for forming a conductive layer on the bonding enforcement layer. [Reference numerals] (S100) Forming a concave unit;(S102) Forming a first sacrificial layer;(S104) Forming a second sacrificial layer;(S106) Forming a third sacrificial layer;(S108) Removing the first sacrificial layer;(S110) Forming a bonding enforcement layer;(S112) Ultraviolet rays - ozone treatment;(S114) Forming a conductive layer;(S116) Removing the second and third sacrificial layers
申请公布号 KR101331589(B1) 申请公布日期 2013.11.20
申请号 KR20120052189 申请日期 2012.05.16
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 HWANG, JUN YOUNG;KANG, HEUI SEOK;KANG, KYUNG TAE;LEE, SANG HO;YUN, GYU YOUNG;SHIN, KWON YONG
分类号 H01L21/28 主分类号 H01L21/28
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