| 摘要 |
A optical module includes, a wavelength variable interference filter (5) which include reflection films (54, 55) opposite to each other and an electrostatic actuator portion including a first electrostatic actuator (561) and a second electrostatic actuator (562) and changing a gap between the reflection films, and a voltage control portion (15) which controls voltage which is applied to the electrostatic actuator portion, the voltage control portion includes, a bias driving portion (151) which applies bias voltage to the first electrostatic actuator, a gap detector (152), and a feedback control portion (153) which applies feedback voltage corresponding to a detected gap amount to the second electrostatic actuator. |
