Thin-film actuator, liquid ejection head, ink cartridge, and image forming apparatus

摘要

A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the intermediate electrode, and an upper electrode disposed on the second piezoelectric layer.