发明名称 DISPLAY DEVICE, ARRAY SUBSTRATE, THIN FILM TRANSISTOR, AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a display device, an array substrate, a thin film transistor, and a manufacturing method thereof.SOLUTION: The thin film transistor comprises a gate, an active layer, and a gate insulating layer disposed between the gate and the active layer. The active layer is of an oxide semiconductor, and the gate insulating layer comprises at least one inorganic insulating thin film. The gate insulating layer of the thin film transistor can effectively avoid an effect of hydrogen groups on the oxide semiconductor, maximize stability of the whole TFT device, and increase an acceptance rate of products.
申请公布号 JP2013232619(A) 申请公布日期 2013.11.14
申请号 JP20120227751 申请日期 2012.10.15
申请人 BOE TECHNOLOGY GROUP CO LTD 发明人 YUAN GUANGCAI;LEE WOO BONG
分类号 H01L29/786;H01L21/283;H01L21/336;H01L29/423;H01L29/49 主分类号 H01L29/786
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