CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device or a charged particle microscope which enables a user to observe even a large sample in the atmosphere or a gas atmosphere.SOLUTION: A charged particle beam device having a structure adopting a thin film dividing a vacuum atmosphere from the atmosphere (or a gas atmosphere) includes: a charged particle optical lens barrel storing a charged particle optical system; a second housing that houses a sample and causes the interior to open to the atmosphere through an opening provided on a side surface during at least the observation of the sample; and a first housing joined to the charged particle optical lens barrel and the second housing and where the interior is exhausted to a vacuum. The charged particle beam device detects secondary electrons or reflection electrons which pass through the thin film and reach an area above the thin film.