发明名称 HYPERBARIC METHODS AND SYSTEMS FOR SURFACE TREATMENT, CLEANING, AND DRYING
摘要 <p>Objects with complex surface profiles can be cleaned effectively using hyperbaric pressure. After partially submerging an object in a superheated liquid, the pressure of the vapor portion of the superheated liquid can be cycled. For example, a valve connected to the vapor portion of the superheated liquid can be opened to an ambient, such as atmospheric ambient to release the chamber pressure. The chamber pressure then can increased, for example, by re-equilibrium or by introducing superheated vapor or heated vapor or gas. During the release of pressure, bubbles can formed on the surface of the object. During the increase of the pressure, the bubbles can be collapsed. The cycling of the bubbles can clean the object surface. Objects can be dried by a quick release of superheated vapor. After providing a superheated vapor to a chamber, the superheated vapor can be released. During the release of pressure, liquid droplets can be evaporated, drying the object.</p>
申请公布号 WO2013169677(A1) 申请公布日期 2013.11.14
申请号 WO2013US39787 申请日期 2013.05.06
申请人 ADVANCED WET TECHNOLOGIES GMBH;PLAVIDAL, W. RICHARD 发明人 PLAVIDAL, W. RICHARD
分类号 B08B3/10;H01L21/302;H01L21/304 主分类号 B08B3/10
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