| 摘要 |
PROBLEM TO BE SOLVED: To provide an irradiation method capable of eliminating the need of making an irradiation beam protrude toward the outside of an irradiation surface, and reducing drive power of an irradiation object; and a processing apparatus.SOLUTION: An irradiation method includes the following steps: in an irradiation surface 17 of an irradiation object 12 that is irradiated with an irradiation beam, an irradiation area 41 that is smaller than the irradiation surface 17 is irradiated with an irradiation beam from an irradiation device arranged on a reference surface 11; and the irradiation object 12 and the irradiation area 41 are moved in a relative manner to irradiate the irradiation surface 17 with the irradiation beam. The irradiation object 12 is moved relative to the irradiation area 41, while the irradiation area 41 is made stationary relative to the reference surface 11, and thereby the irradiation area 41 is moved along a spiral 42 configured on the irradiation object 12. |
