发明名称 DEVICE AND METHOD FOR DRYING PHOTOMASK
摘要 An object of the present invention is a photomask drying device which includes: a sealed chamber containing at least one photomask, a pumping unit to set up and maintain vacuum within said chamber, a support for the photomask placed within said chamber, infrared radiation means placed within said chamber, a system for injecting gas into said chamber characterized in that the infrared radiation means comprise a plurality of infrared radiation sources distributed in a plane parallel to the plane of the photomask in such a way that the distance from the photomask to the infrared radiation means is given by the relationship: D=1.5×d wherein D is the distance between the plane containing the infrared radiation sources and the photomask and d is the distance between the center points of two neighboring infrared radiation sources, and in that the gas injection system comprises a plurality of gas injectors distributed in a plane parallel to the plane of the photomask in such a way that the injectors follow a 90° rotational invariance about the center point of the photomask.
申请公布号 KR20130124177(A) 申请公布日期 2013.11.13
申请号 KR20127034279 申请日期 2011.06.27
申请人 ADIXEN VACUUM PRODUCTS 发明人 THOVEX CINDY;BELLET BERTRAND
分类号 F26B5/04;F26B7/00;F26B21/14 主分类号 F26B5/04
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