发明名称 METHOD AND APPARATUS FOR PRODUCING SOLID PRODUCT
摘要 Provided is a production method for producing a solid product by a reaction of gaseous raw materials with a plurality of components including a step of conducting the reaction using a reactor disposed in a vertical direction; a step of feeding the gaseous raw materials with a plurality of components from the upper part of the reactor; a step of, in the lower part of the reactor, forming a seal gas layer composed of a gas having a high density and fed continuously from the lower part of the reactor; a step of discharging an exhaust gas containing a by-product gas generated by the reaction and unreacted gaseous raw materials from somewhere in the upper part of the formed seal gas layer; and a step of accommodating a solid product in the seal gas layer of the lower part.
申请公布号 KR101328521(B1) 申请公布日期 2013.11.13
申请号 KR20080021934 申请日期 2008.03.10
申请人 发明人
分类号 H01L21/205;H01L21/223 主分类号 H01L21/205
代理机构 代理人
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