| 摘要 |
PURPOSE: A fluidized bed reactor including a reaction gas supplying nozzle is provided to reduce silicon extracted from a reaction gas supplying nozzle by using an inclined spraying part formed in the reaction gas supplying nozzle. CONSTITUTION: A reaction chamber(110) provides an inner space(111) for extracting silicon. A reaction gas supplying nozzle(120) supplies a reaction gas to the inner space of the reaction chamber. A non-active gas supplying nozzle(130) supplies an inert gas to the inner space of the reaction chamber. A flowing gas supplying nozzle(150) supplies a flowing gas to the inner space of the reaction chamber. A heater(160) supplies heat to the inner space of the reaction chamber. [Reference numerals] (AA) Cooling gas; (BB) Reaction gas, etching gas |
