发明名称 |
Apparatus for VHF impedance match tuning |
摘要 |
Embodiments of impedance matching networks are provided herein. In some embodiments, an impedance matching network may include a coaxial resonator having an inner and an outer conductor. A tuning capacitor may be provided for variably controlling a resonance frequency of the coaxial resonator. The tuning capacitor may be formed by a first tuning electrode and a second tuning electrode and an intervening dielectric, wherein the first tuning electrode is formed by a portion of the inner conductor. A load capacitor may be provided for variably coupling energy from the inner conductor to a load. The load capacitor may be formed by the inner conductor, an adjustable load electrode, and an intervening dielectric.
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申请公布号 |
US8578879(B2) |
申请公布日期 |
2013.11.12 |
申请号 |
US20090511377 |
申请日期 |
2009.07.29 |
申请人 |
RAMASWAMY KARTIK;HANAWA HIROJI;COLLINS KENNETH S.;WONG LAWRENCE;BANNA SAMER;NGUYEN ANDREW;APPLIED MATERIALS, INC. |
发明人 |
RAMASWAMY KARTIK;HANAWA HIROJI;COLLINS KENNETH S.;WONG LAWRENCE;BANNA SAMER;NGUYEN ANDREW |
分类号 |
C23C16/00;C23F1/00;H01L21/306;H01P7/04;H01P7/06 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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