APPARATUS FOR APPLYING LIQUID, METHOD FOR APPLYING LIQUID, AND NANO-IMPRINT SYSTEM

摘要

A liquid application device includes: a liquid ejection head including: nozzles configured to perform ejection of droplets of liquid toward a substrate; and liquid chambers connected respectively to the nozzles and defined by side walls, at least respective parts of the side walls being constituted of piezoelectric elements, the liquid ejection head being configured to cause shear deformation of the piezoelectric elements to eject the droplets of the liquid in the liquid chamber through the nozzles; and a droplet ejection control device configured to group the nozzles into groups of not less than three in such a manner that adjacent nozzles belong to different groups, and is configured to control operation of the piezoelectric elements in such a manner that the droplet ejection is performed at a same timing only through the nozzles belonging to a same group so as to deposit the liquid discretely onto the substrate.