| 摘要 |
The present invention relates to a semiconductor chamber including a chamber body; a chamber lead installed on the top surface of the chamber body; a showerhead installed in an inner space formed by the chamber body and the chamber lead; an oring installed on the edge bottom surface of the chamber body or the edge top surface of the chamber body. Particularly, an arcking prevention insert is installed in a separation space between the chamber lead and the chamber body generated by the oring. The arcking prevention insert touches the outside surface of the chamber body in a main body. A flange is formed in the upper part of the main boy and between the chamber body and the chamber lead. An arching phenomenon is fundamentally prevented. |
