| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistance measuring apparatus that can detect the disconnection and contact failure of a probe while performing measurement process on a measuring object without a dedicated circuit for detecting a contact between the probe and the measuring object.SOLUTION: A processing part 7 performs resistance calculation processing at the moment of inspection included in a transitional period in which a current value Ia gradually changes due to capacitance component toward convergence value immediately after the start of output of measured current I by a power source part 4, to thereby calculate a resistance value R. The processing part 7, on the basis of whether the resistance value R falls within a determination range, further performs disconnection and contact inspection processing for inspecting the disconnection of probes 2, 3, and a contact quality of the probes 2, 3 and a measuring object 11, by regarding as determination range a range including the resistance value R calculated at the moment of inspection in a state in which both the disconnection of the probes 2, 3 and the contact failure of the probes 2, 3 and the measuring object 11 do not occur. |
