发明名称 SUPERJUNCTION POWER MOSFET
摘要 An embodiment of an MOS device includes a semiconductor substrate of a first conductivity type, a first region of the first conductivity type having a length Lacc and a net active dopant concentration of about Nfirst, a pair of spaced-apart body regions of a second opposite conductivity type and each having a length Lbody and a net active dopant concentration of about Nsecond, channel regions located in the spaced-apart body regions, source regions of the first conductivity type located in the spaced-apart body regions and separated from the first region by the channel regions, an insulated gate overlying the channel regions and the first region, and a drain region of the first conductivity type located beneath the first region. In an embodiment, (Lbody*Nsecond)=k1*(Lacc*Nfirst), where k1 has a value in the range of about 0.6<=k1<=1.4.
申请公布号 KR101324855(B1) 申请公布日期 2013.11.01
申请号 KR20087014424 申请日期 2006.11.13
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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