发明名称 |
Forming A Funnel-Shaped Nozzle |
摘要 |
Techniques are provided for making a funnel-shaped nozzle in a semiconductor substrate. The funnel-shaped recess includes a straight-walled bottom portion and a curved top portion having a curved sidewall gradually converging toward and smoothly joined to the straight-walled bottom portion, and the curved top portion encloses a volume that is substantially greater than a volume enclosed by the straight-walled bottom portion.
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申请公布号 |
US2013286097(A1) |
申请公布日期 |
2013.10.31 |
申请号 |
US201213460503 |
申请日期 |
2012.04.30 |
申请人 |
DE BRABANDER GREGORY;NEPOMNISHY MARK;HIGGINSON JOHN A. |
发明人 |
DE BRABANDER GREGORY;NEPOMNISHY MARK;HIGGINSON JOHN A. |
分类号 |
B41J2/14;H01L21/02 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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