| 摘要 |
The apparatus for detecting surface defects of a glass substrate, having a dark field optical system, includes: a first photographing device for photographing first image; a second photographing for photographing second image; a dark field illumination system disposed below the glass substrate for serving as a dark field illumination; and a detection signal processor operating coordinates of a defect position on the first image and the second image, wherein the first photographing device and the second photographing device form photographing areas in the shape of lines which are not parallel to at least the transferring direction of the glass substrate, form photographing areas for a top surface of the glass substrate to be overlapped by each other and form photographing areas for a bottom surface of the glass substrate differently from each other. |
