| 摘要 |
PROBLEM TO BE SOLVED: To move a mirror element consisting of a micro mirror mechanism in parallel or tilt the mirror element.SOLUTION: A pair of support members 54A and 54B including a spring part in a portion of the support member supports a mirror element 52, and a pair of driving mechanisms 66A and 66B provided corresponding to each of the pair of support members deforms a spring part of a corresponding support member. Thereby, the support member changes a distance between a support point supporting the mirror element and a base BS. By driving all driving mechanisms in this way, the mirror element can move in parallel, and by driving a part of the driving mechanisms, the mirror element can be tilted with respect to the base. |
