发明名称 |
OPTICS FOR CONTROLLING LIGHT TRANSMITTED THROUGH A CONICAL QUARTZ DOME |
摘要 |
<p>Embodiments described herein generally relate to apparatus for heating substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps is positioned to provide radiant energy through an optically transparent dome to a substrate positioned on the substrate support. A light focusing assembly is positioned within the chamber to influence heating and temperature distribution on the substrate and to facilitate formation of a film on a substrate having uniform properties, such as density. The light focusing assembly can include one or more reflectors, light pipes, or refractive lenses.</p> |
申请公布号 |
WO2013162712(A1) |
申请公布日期 |
2013.10.31 |
申请号 |
WO2013US29344 |
申请日期 |
2013.03.06 |
申请人 |
APPLIED MATERIALS, INC.;RANISH, JOSEPH M. |
发明人 |
RANISH, JOSEPH M. |
分类号 |
H01L21/205;H01L21/02;H01L21/324 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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