Substrate treating system

摘要

A substrate treating system includes a coating apparatus having a resist coating unit, an exposing apparatus having an exposing machine and a heat-treating unit, and a controller for controlling the resist coating unit, exposing machine and heat-treating unit. The controller coordinates schedules of treatment in the coating apparatus and exposing apparatus, such that the coating apparatus can operate efficiently despite an increase in the processing time of the exposing machine.

主权项

1. A substrate treating system comprising:
a coating apparatus including a resist coating unit for forming resist film on substrates; an exposing apparatus constructed separately from said coating apparatus with a spacing therebetween, and including an exposing machine for exposing the substrates having the resist film formed thereon, and a heat-treating unit for heating the substrates exposed; each of said coating apparatus and said exposing apparatus including an indexer block for moving the substrates into and out of a container constructed for storing a plurality of substrates; a transport device disposed outside said coating apparatus and said exposing apparatus for transporting said container between the respective indexer blocks of said coating apparatus and said exposing apparatus; and a control device configured to control said resist coating unit, said exposing machine, said heat-treating unit and said transport device, said control device being configured to adjust schedules of treatments in said coating apparatus and said exposing apparatus; wherein said control device and said transport device are further configured, when said coating apparatus is resting from treatment of substrates to be transferred to said exposing apparatus, to permit treatment of substrates to be transferred via said space to an apparatus other than said exposing apparatus.