| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring window structure installed on a surface plate for measuring the plate thickness of a workpiece during polishing in a polishing apparatus, easy to replace a window plate and suited to highly precise measurement.SOLUTION: A measuring window structure 10 is formed by attaching a window member 11 to a measuring hole 81 penetrating front and rear surfaces of a surface plate 80. The window member 11 comprises a cylindrical part 12 insertable into the measuring hole 81, a window plate 13 provided at one end of the cylindrical part 12, and a fixing part 14 provided at the other end of the cylindrical part 12, and the fixing part 14 is fixed to the front surface of the surface plate 80. Furthermore, in the window member 11, the attachment angle of the fixing part 14 with respect to the front surface of the surface plate 80 is adjustable, and an attaching position can be moved in the axial direction of the measuring hole 81. |
