| 摘要 |
PROBLEM TO BE SOLVED: To provide an adsorption apparatus in which a piston moves at high speed.SOLUTION: An adsorption apparatus includes: a cylinder 106; a piston 107 that divides the interior of the cylinder 106 into a first chamber (first cylinder chamber 104) and a second chamber (second cylinder chamber 105) and is moved by a pressure difference between the first chamber and the second chamber; a cylinder rod 108 disposed at the piston 107 and projected to the outside of the cylinder 106 through the first chamber; an adsorption pad 102 mounted to the cylinder rod 108 outside the cylinder 106 and having an opening (adsorption pad chamber 109) opened to the outside atmosphere of the cylinder 106; a first flow path 110 allowing communication between the interior of the first chamber and the opening; a second flow path 111 allowing communication between the interior of the second chamber and the opening; and a pump 113 for sucking the internal gas of the first chamber via a third flow path 103. |
