HEAT EXCHANGE DEVICE AND PRESSURE SENSOR THEREOF

摘要

A pressure sensor comprises a base (21) and a diaphragm (23) covered on an opening portion of the base (21), the diaphragm (23) being provided on the inner side with a medium cavity (24) and being provided on the outer side with a fluid cavity for accommodating a fluid of which the pressure is to be measured; and a pad (29) disposed in the medium cavity (24) and having medium passages (291) thereon. In a deformation direction of the diaphragm (23), a distance between the greatest deformation position of the diaphragm (23) and the pad (29) is smaller than or equal to the deformation limit of the diaphragm (23). Also disclosed is a heat exchange device comprising the pressure sensor.