| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for keeping immersion liquid in a space adjacent to an optical assembly that projects an image onto a substrate, in a lithographic projection apparatus.SOLUTION: An insertion member 226 insertable into a space between an optical assembly 16 and a substrate 208 or/and a substrate table divides immersion liquid into a first portion and a second portion, the first portion located between the optical assembly 16 and the insertion member 226, the second portion located between the insertion member 226 and the substrate 208 or/and the substrate table. The insertion member 226 keeps the optical assembly 16 in contact with the first portion when the substrate 208 is moved away from the location adjacent to the optical assembly 16. |
