发明名称 HIGH STIFFNESS, ANTI-SLIP SCRUBBER BRUSH ASSEMBLY, HIGH-STIFFNESS MANDREL, SUBASSEMBLIES, AND ASSEMBLY METHODS
摘要 <p>In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush having a body of open-cell foam including an interior surface, a sleeve received in contact with the scrubber brush, the sleeve including peripherally-spaced, longitudinal walls and reinforcing segments interconnecting adjacent ones of the longitudinal walls and forming elongated pockets along the length, the sleeve having raised ribs extending along the length, and a mandrel having recesses formed on an outer surface, the mandrel being coupled to the sleeve by receiving the raised ribs within the recesses. Scrubber brush subassemblies, high stiffness mandrels, and methods of assembly are provided, as are numerous other aspects.</p>
申请公布号 WO2013162864(A1) 申请公布日期 2013.10.31
申请号 WO2013US35682 申请日期 2013.04.08
申请人 APPLIED MATERIALS, INC. 发明人 CHEN, HUI;CHEN, HUNG;ATKINSON, JIM;HUO, DAVID D.
分类号 H01L21/302 主分类号 H01L21/302
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