发明名称 |
REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM |
摘要 |
<p>Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.</p> |
申请公布号 |
SG193503(A1) |
申请公布日期 |
2013.10.30 |
申请号 |
SG20130069919 |
申请日期 |
2012.02.24 |
申请人 |
QUANTUM GLOBAL TECHNOLOGIES LLC |
发明人 |
WANG, JIANSHENG;STANCZYK, BARBARA;BOYD, WENDELL;PAPKE, KEVIN, A.;SOMMERS, JOSEPH, F.;DO, DAVID |
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