| 摘要 |
<p>- --METHOD FOR OPERATING A PULSED ARC SOURCE Abstract5 ire invention. relates to an arc method foP deposit ing Hr sulating layers and to an arc, ppathod for low temprature coat nq . To this end, an electrical spark felH scharde, which s gnited or operated on a surface of a tardet (5) of an arc source, is simultaneously10 supplied with a /ti.r2ct current ap well ap with pulsed or alternating current . The invention also relates to an arc source in which the target (5) is connected to a power supply unit (13) that comprises either at least one firTt c;,d hH ph-current. supply (18, 18' ) and15 another power supply (13' , 18" or is a. power supply(21, 21', 22) de s ioned with combinational cf rcu if technology.Fig 2</p> |
