发明名称 |
PASTE APPLYING APPARATUS, PASTE APPLYING METHOD, AND DIE BONDER |
摘要 |
<p>PURPOSE: A paste coating device, a paste coating method, and a die bonder are provided to reduce a wet spot of a coating pattern by forming a small margin part. CONSTITUTION: A paste coating device is initially set (S100). A substrate is mounted on a substrate absorbing unit (S200). The substrate is provisionally positioned (S300). A pattern writing process of a fluid material is performed (S400). The substrate which is completely coated and written is outputted (S500). It is determined whether all substrates are completely coated or not (S600). [Reference numerals] (AA) Supply power; (BB) No; (CC) Yes; (DD) Stop; (S100) Initial setting; (S200) Substrate mounting; (S300) Substrate preliminary position determination; (S400) Exposure; (S500) Substrate discharge; (S600) End ?</p> |
申请公布号 |
KR20130118195(A) |
申请公布日期 |
2013.10.29 |
申请号 |
KR20120089579 |
申请日期 |
2012.08.16 |
申请人 |
HITACHI HIGH-TECH INSTRUMENT CO., LTD. |
发明人 |
OKUBO TATSUYUKI;YODA MITSUO;OTAKE SHIGERU |
分类号 |
H01L21/56;H01L21/58 |
主分类号 |
H01L21/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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