发明名称 PASTE APPLYING APPARATUS, PASTE APPLYING METHOD, AND DIE BONDER
摘要 <p>PURPOSE: A paste coating device, a paste coating method, and a die bonder are provided to reduce a wet spot of a coating pattern by forming a small margin part. CONSTITUTION: A paste coating device is initially set (S100). A substrate is mounted on a substrate absorbing unit (S200). The substrate is provisionally positioned (S300). A pattern writing process of a fluid material is performed (S400). The substrate which is completely coated and written is outputted (S500). It is determined whether all substrates are completely coated or not (S600). [Reference numerals] (AA) Supply power; (BB) No; (CC) Yes; (DD) Stop; (S100) Initial setting; (S200) Substrate mounting; (S300) Substrate preliminary position determination; (S400) Exposure; (S500) Substrate discharge; (S600) End ?</p>
申请公布号 KR20130118195(A) 申请公布日期 2013.10.29
申请号 KR20120089579 申请日期 2012.08.16
申请人 HITACHI HIGH-TECH INSTRUMENT CO., LTD. 发明人 OKUBO TATSUYUKI;YODA MITSUO;OTAKE SHIGERU
分类号 H01L21/56;H01L21/58 主分类号 H01L21/56
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