发明名称 |
Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector |
摘要 |
The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.
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申请公布号 |
US8569677(B2) |
申请公布日期 |
2013.10.29 |
申请号 |
US20100843773 |
申请日期 |
2010.07.26 |
申请人 |
GESSNER OLIVER;KORNILOV OLEG A.;WILCOX RUSSELL B.;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
GESSNER OLIVER;KORNILOV OLEG A.;WILCOX RUSSELL B. |
分类号 |
H01J3/14;H01J5/02 |
主分类号 |
H01J3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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