METHOD OF MANUFACTURING STAMP FOR IMPRINT LITHOGRAPHY AND THE DUPLICATED STAMP FOR USING THE SAME

摘要

PURPOSE: A method for manufacturing a stamp for imprint lithography and a duplicated stamp manufactured by using the same are provided to obtain a complex stamp by performing an ultraviolet irradiation and a thermal curing process. CONSTITUTION: A resist (200) is coated on a substrate (100). A solvent in the resist is evaporated by a heating process. A master stamp (300) on the substrate is compressed. A k pattern is transferred to the resist. The resist is cured by an ultraviolet irradiation process. [Reference numerals] (AA,BB) Applied pressure