DRIVE DEVICE, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide an advantageous technique for preventing particles from scattering in a drive device.SOLUTION: A drive device 100 includes a shaft member 2 supported on a base 1 and a movable member movable along the axis of the shaft member 2. The device further includes a plurality of plate members, which include a through-hole where the shaft member 2 penetrates and which surround the shaft member 2. The plurality of plate members are spaced apart from one another and disposed in a moving direction of the movable member.