POWER SUPPLY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a power supply device capable of stably controlling discharge oscillation even when a stable control region of an ion accelerator changes with lapse of time.SOLUTION: A power supply device controls an ion accelerator comprising an anode electrode, a magnetic field generation unit which is disposed adjacent to the anode electrode and generates a magnetic field, and a supply unit which supplies a gas to a channel space between the anode electrode and the magnetic field generation unit from the anode electrode side. The ion accelerator accelerates an ion in the channel space by making an electron supplied to the channel space act on the gas by Hall effect. The power supply device includes a control unit which controls a voltage to be applied to the anode electrode. The control unit controls the voltage applied to the anode electrode so as to have a voltage waveform in which an AC voltage is superposed on a DC voltage.