| 摘要 |
A method is described for controlling the efficiency of an abatement system for treating a gas stream, in which a portion of the gas stream is diverted away from a plasma abatement device for removing a perfluorinated species from the gas stream, and returned to the gas stream upstream from the abatement device as a purge gas for a vacuum pump. This can reduce both the power requirement of the abatement device and the amount of inert gas added to the gas stream to make up the purge gas. |
