| 摘要 |
PURPOSE: A movable optical device for checking the surface of a workpiece is provided to have the structure on which a lens is moved and to remove a stage which is utilized for a microscope, thereby confirming the surface of a workpiece while the workpiece is placed on the ground surface or a disc according to conditions of a field. CONSTITUTION: A movable optical device for checking the surface of a workpiece includes an optical unit (10), a body unit (20), and a base unit (30). The optical unit includes a lens (11), a lighting unit (12), and a three-axis precise transferring stage (13). The lens is formed in order to observe a workpiece object. The lighting unit lights to the workpiece. The three-axis precise transferring stage moves the lens and the lighting unit in x, y, and z axes. The body unit includes a column (21), an elevating block (22), an arm (23), and a rotation movable block (24). The base unit, which is a movable structure, is installed on the ground surface, thereby supporting the body unit. |
